In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based Inorganic–Organic Hybrid Thin Films for EUV Resist Platform

Author

Dan N Le, Won-Il Lee, Su Min Hwang, Ashwanth Subramanian, Nikhil Tiwale, Jihoon Woo, Jean-Francois Veyan, Abdullah Al-Mahboob, Jerzy T Sadowski, Jin-Hyun Kim, Thi Thu Huong Chu, Doo San Kim, Minjong Lee, Rino Choi, Jinho Ahn, Myung Mo Sung, Chang-Yong Nam

Journal

ACS Applied Materials & Interfaces

Vol

17

Page

18729-18739

Year

25.03