Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure

Author

Jaehyuk Lee, Hyeonseok Ji, Chawon Koh, Juyeong Lee, Ji-Hoo Seok, Jinho Ahn, Chang Gyoun Kim, Jiho Kim, Inhui Hwang, Hyungju Ahn, Kug-Seung Lee, Sangsul Lee, Dimitrios Kazazis, Prajith Karadan, Yasin Ekinci, Gregory Denbeaux, Ji Young Park, Won-Joon Son, S

Journal

Materials Today

Vol

87

Page

20-28

Year

25.04