Vapor-Phase Dry Development of a Nanoscale Zn-Based Metal–Organic Extreme Ultraviolet Photoresist via Surface-Limited β-Diketone Chelation for High-Resolution Patterning

Author

Ji-Hoo Seok, Jiwon Kim, Hyeonseok Ji, Jaehyuk Lee, Taeho Lee, Kwang-Sub Yoon, Myung Mo Sung, Jinho Ahn

Journal

ACS Applied Nano Materials

Vol

9

Page

5506-5515

Year

2026.03